Static and Dynamic Postannealing Strategies for Roll-to-Roll Fabrication of DC Magnetron Sputtered Bismuth Telluride Thin Films onto Polymer Webs

High-throughput roll-to-roll processes are desirable to scale up the manufacture of flexible thermoelectric generators. While vacuum deposition onto a heated dynamic substrate presents considerable engineering challenge, viable postdeposition in-line annealing considered as an alternative improve functional performance as-deposited films. The effect infrared and electron-beam irradiations 1 μm thick bismuth telluride thin films, produced by process for use materials, was examined. A static oven pulsed high-energy electron beam were also studied control groups. All strategies increased crystallite size decreased Te content. Only treatment shown significantly film’s crystallinity. After h annealing, power factor improved 400% (from 2.8 14 × 10–4 W/mK2), which, knowledge authors, is highest reported postannealed or hot-deposited Bi–Te As post treatments 146% 6.9 W/mK2) 64% 4.6 respectively.